We machine production parts for Semiconductor Equipment customers, from single prototypes through to repeat batches of tens of thousands. Typical work covers chamber components, gas delivery manifolds and wafer handling arms, usually in 6061 or 5083.
What makes Semiconductor Equipment different from general machining is not the geometry — it is the documentation and the failure modes. The parts that come back are the ones where particle generation and outgassing matter more than dimensional tolerance was not designed out at the start.
Parts we machine for Semiconductor Equipment
- Chamber components
- Gas delivery manifolds
- Wafer handling arms
- Electrostatic chuck bases
Materials we run for Semiconductor Equipment
- 6061
- 5083
- 316L VAR
- PEEK
- PPS
- Alumina
Standards and documentation
- SEMI S2, SEMI F57 for high-purity fluid handling
Tell us which standard applies and which documents you need with the shipment. Dimensional reports, material certificates, certificates of conformity and first article inspection reports are all available, and it is much cheaper to agree them before the batch runs than to reconstruct them afterwards.
Where Semiconductor Equipment projects usually go wrong
- Particle generation and outgassing matter more than dimensional tolerance
- Cleaning and packaging specs are part of the drawing
Tolerance and finish we hold
| Requirement | Typical capability |
|---|---|
| General tolerance | +/-0.01 mm and Ra 0.2 um on wetted surfaces; electropolish often specified |
| Surface finish | Ra 0.4 to 3.2 um |
| Material certification | EN 10204 3.1 on request |
| Inspection | Dimensional report, CMM report, FAIR |
| Packaging | VCI and desiccant for steel, individual wrap for cosmetic faces |
Frequently asked questions
Do you have experience with Semiconductor Equipment parts?
Yes. Typical parts we run are chamber components and gas delivery manifolds. We can share the process route and inspection approach for a comparable part before you commit.
Which materials do you recommend for Semiconductor Equipment?
6061, 5083, 316L VAR, PEEK. The right choice depends on which of corrosion, weight, strength and cost is the binding constraint, and we will say so plainly rather than quoting the most expensive option.
What documentation do you provide?
A dimensional report and a certificate of conformity as standard. Material certificates, CMM reports, FAIR and PPAP submissions are available when your quality system requires them.
What tolerances do you hold for Semiconductor Equipment parts?
+/-0.01 mm and Ra 0.2 um on wetted surfaces; electropolish often specified is typical for the industry. Tighter tolerance on individual features is possible and is quoted against the specific feature rather than the whole part.
Related pages
- Industries — the full index for this section.
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- Instant CNC quote
- Tolerance quick reference
- Frequently asked questions
Get a price for your part
Send a STEP file and a drawing with tolerances, material and quantity. We quote within one working day and machine in our own facility in Shenzhen — milling, turning, EDM, grinding and finishing under one roof, no trading middleman.
Start an instant quote or send your drawings directly. English-speaking engineering support, DFM feedback before you commit to a batch.